8/9/2012	9:17:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2012	9:17:21 AM	Recipe started at 9:17 AM
8/9/2012	9:17:21 AM	Helium valve closed
8/9/2012	9:17:21 AM	H2 valve closed
8/9/2012	9:17:21 AM	BCl3 valve closed
8/9/2012	9:17:21 AM	PH3 valve closed
8/9/2012	9:17:21 AM	SiCl4 pre valve closed
8/9/2012	9:17:21 AM	SiCl4 post valve closed
8/9/2012	9:17:21 AM	Main Vac valve closed
8/9/2012	9:17:21 AM	Bypass valve closed
8/9/2012	9:17:21 AM	Bubbler valve closed
8/9/2012	9:17:21 AM	Helium MFC set to  0.000000
8/9/2012	9:17:21 AM	H2 MFC set to  0.000000
8/9/2012	9:17:21 AM	BCl3 MFC set to  0.000000
8/9/2012	9:17:21 AM	PH3 MFC set to  0.000000
8/9/2012	9:17:21 AM	SiCl4 MFC set to  0.000000
8/9/2012	9:17:21 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:17:22 AM	Tube furnace set to 0
8/9/2012	9:17:25 AM	H2 valve closed
8/9/2012	9:17:25 AM	BCl3 valve closed
8/9/2012	9:17:25 AM	PH3 valve closed
8/9/2012	9:17:25 AM	SiCl4 pre valve closed
8/9/2012	9:17:25 AM	SiCl4 post valve closed
8/9/2012	9:17:25 AM	Main Vac valve closed
8/9/2012	9:17:25 AM	Bypass valve closed
8/9/2012	9:17:25 AM	Bubbler valve closed
8/9/2012	9:17:25 AM	Helium valve opened
8/9/2012	9:17:25 AM	Helium MFC set to  500.000000
8/9/2012	9:17:25 AM	H2 MFC set to  0.000000
8/9/2012	9:17:25 AM	BCl3 MFC set to  0.000000
8/9/2012	9:17:25 AM	PH3 MFC set to  0.000000
8/9/2012	9:17:25 AM	SiCl4 MFC set to  0.000000
8/9/2012	9:17:25 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:17:25 AM	Tube furnace set to 0
8/9/2012	9:18:37 AM	Helium valve closed
8/9/2012	9:18:37 AM	H2 valve closed
8/9/2012	9:18:37 AM	BCl3 valve closed
8/9/2012	9:18:37 AM	PH3 valve closed
8/9/2012	9:18:37 AM	SiCl4 pre valve closed
8/9/2012	9:18:37 AM	SiCl4 post valve closed
8/9/2012	9:18:37 AM	Main Vac valve closed
8/9/2012	9:18:37 AM	Bypass valve closed
8/9/2012	9:18:37 AM	Bubbler valve closed
8/9/2012	9:18:37 AM	Helium MFC set to  0.000000
8/9/2012	9:18:37 AM	H2 MFC set to  0.000000
8/9/2012	9:18:37 AM	BCl3 MFC set to  0.000000
8/9/2012	9:18:37 AM	PH3 MFC set to  0.000000
8/9/2012	9:18:37 AM	SiCl4 MFC set to  0.000000
8/9/2012	9:18:37 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:18:37 AM	Tube furnace set to 0
8/9/2012	9:18:39 AM	Run finished at 9:18 AM
8/9/2012	9:18:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2012	9:25:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2012	9:25:46 AM	Recipe started at 9:25 AM
8/9/2012	9:25:46 AM	Helium valve closed
8/9/2012	9:25:46 AM	H2 valve closed
8/9/2012	9:25:46 AM	BCl3 valve closed
8/9/2012	9:25:46 AM	PH3 valve closed
8/9/2012	9:25:46 AM	SiCl4 pre valve closed
8/9/2012	9:25:46 AM	SiCl4 post valve closed
8/9/2012	9:25:46 AM	Main Vac valve closed
8/9/2012	9:25:46 AM	Bubbler valve closed
8/9/2012	9:25:46 AM	Bypass valve opened
8/9/2012	9:25:46 AM	Helium MFC set to  0.000000
8/9/2012	9:25:46 AM	H2 MFC set to  0.000000
8/9/2012	9:25:46 AM	BCl3 MFC set to  0.000000
8/9/2012	9:25:46 AM	PH3 MFC set to  0.000000
8/9/2012	9:25:46 AM	SiCl4 MFC set to  0.000000
8/9/2012	9:25:46 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:25:46 AM	Tube furnace set to 0
8/9/2012	9:27:09 AM	Helium valve closed
8/9/2012	9:27:09 AM	H2 valve closed
8/9/2012	9:27:09 AM	BCl3 valve closed
8/9/2012	9:27:09 AM	PH3 valve closed
8/9/2012	9:27:09 AM	SiCl4 pre valve closed
8/9/2012	9:27:09 AM	SiCl4 post valve closed
8/9/2012	9:27:09 AM	Main Vac valve closed
8/9/2012	9:27:09 AM	Bubbler valve closed
8/9/2012	9:27:09 AM	Bypass valve opened
8/9/2012	9:27:09 AM	Helium MFC set to  0.000000
8/9/2012	9:27:09 AM	H2 MFC set to  0.000000
8/9/2012	9:27:09 AM	BCl3 MFC set to  0.000000
8/9/2012	9:27:09 AM	PH3 MFC set to  0.000000
8/9/2012	9:27:09 AM	SiCl4 MFC set to  0.000000
8/9/2012	9:27:09 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:27:10 AM	Tube furnace set to 0
8/9/2012	9:28:10 AM	Helium valve closed
8/9/2012	9:28:10 AM	H2 valve closed
8/9/2012	9:28:10 AM	BCl3 valve closed
8/9/2012	9:28:10 AM	PH3 valve closed
8/9/2012	9:28:10 AM	SiCl4 pre valve closed
8/9/2012	9:28:10 AM	SiCl4 post valve closed
8/9/2012	9:28:10 AM	Bypass valve closed
8/9/2012	9:28:10 AM	Bubbler valve closed
8/9/2012	9:28:10 AM	Main Vac valve opened
8/9/2012	9:28:10 AM	Helium MFC set to  0.000000
8/9/2012	9:28:10 AM	H2 MFC set to  0.000000
8/9/2012	9:28:10 AM	BCl3 MFC set to  0.000000
8/9/2012	9:28:10 AM	PH3 MFC set to  0.000000
8/9/2012	9:28:10 AM	SiCl4 MFC set to  0.000000
8/9/2012	9:28:10 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:28:10 AM	Tube furnace set to 0
8/9/2012	9:28:11 AM	Run finished at 9:28 AM
8/9/2012	9:28:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2012	10:49:11 AM	Main Vac valve closed
8/9/2012	10:49:24 AM	Main Vac valve opened
8/9/2012	10:50:32 AM	Recipe started at 10:50 AM
8/9/2012	10:50:32 AM	Helium valve closed
8/9/2012	10:50:32 AM	H2 valve closed
8/9/2012	10:50:32 AM	BCl3 valve closed
8/9/2012	10:50:32 AM	PH3 valve closed
8/9/2012	10:50:32 AM	SiCl4 pre valve closed
8/9/2012	10:50:32 AM	SiCl4 post valve closed
8/9/2012	10:50:32 AM	Bypass valve closed
8/9/2012	10:50:32 AM	Bubbler valve closed
8/9/2012	10:50:32 AM	Main Vac valve opened
8/9/2012	10:50:32 AM	Helium MFC set to  0.000000
8/9/2012	10:50:32 AM	H2 MFC set to  0.000000
8/9/2012	10:50:32 AM	BCl3 MFC set to  0.000000
8/9/2012	10:50:32 AM	PH3 MFC set to  0.000000
8/9/2012	10:50:32 AM	SiCl4 MFC set to  0.000000
8/9/2012	10:50:32 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:50:32 AM	Tube furnace set to 0
8/9/2012	10:50:35 AM	Helium valve closed
8/9/2012	10:50:35 AM	H2 valve closed
8/9/2012	10:50:35 AM	BCl3 valve closed
8/9/2012	10:50:35 AM	PH3 valve closed
8/9/2012	10:50:35 AM	SiCl4 pre valve closed
8/9/2012	10:50:35 AM	SiCl4 post valve closed
8/9/2012	10:50:35 AM	Main Vac valve closed
8/9/2012	10:50:35 AM	Bypass valve closed
8/9/2012	10:50:35 AM	Bubbler valve closed
8/9/2012	10:50:35 AM	Helium MFC set to  0.000000
8/9/2012	10:50:35 AM	H2 MFC set to  0.000000
8/9/2012	10:50:35 AM	BCl3 MFC set to  0.000000
8/9/2012	10:50:35 AM	PH3 MFC set to  0.000000
8/9/2012	10:50:35 AM	SiCl4 MFC set to  0.000000
8/9/2012	10:50:35 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:50:36 AM	Tube furnace set to 0
8/9/2012	10:50:39 AM	Helium valve closed
8/9/2012	10:50:39 AM	BCl3 valve closed
8/9/2012	10:50:39 AM	PH3 valve closed
8/9/2012	10:50:39 AM	SiCl4 pre valve closed
8/9/2012	10:50:39 AM	SiCl4 post valve closed
8/9/2012	10:50:39 AM	Main Vac valve closed
8/9/2012	10:50:39 AM	Bypass valve closed
8/9/2012	10:50:39 AM	Bubbler valve closed
8/9/2012	10:50:39 AM	H2 valve opened
8/9/2012	10:50:39 AM	Helium MFC set to  0.000000
8/9/2012	10:50:39 AM	H2 MFC set to  500.000000
8/9/2012	10:50:39 AM	BCl3 MFC set to  0.000000
8/9/2012	10:50:39 AM	PH3 MFC set to  0.000000
8/9/2012	10:50:39 AM	SiCl4 MFC set to  0.000000
8/9/2012	10:50:39 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:50:39 AM	Tube furnace set to 0
8/9/2012	10:51:55 AM	Helium valve closed
8/9/2012	10:51:55 AM	BCl3 valve closed
8/9/2012	10:51:55 AM	PH3 valve closed
8/9/2012	10:51:55 AM	SiCl4 pre valve closed
8/9/2012	10:51:55 AM	SiCl4 post valve closed
8/9/2012	10:51:55 AM	Main Vac valve closed
8/9/2012	10:51:55 AM	Bypass valve closed
8/9/2012	10:51:55 AM	H2 valve opened
8/9/2012	10:51:55 AM	Bubbler valve opened
8/9/2012	10:51:55 AM	Helium MFC set to  0.000000
8/9/2012	10:51:55 AM	H2 MFC set to  500.000000
8/9/2012	10:51:55 AM	BCl3 MFC set to  0.000000
8/9/2012	10:51:55 AM	PH3 MFC set to  0.000000
8/9/2012	10:51:55 AM	SiCl4 MFC set to  0.000000
8/9/2012	10:51:55 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:51:55 AM	Tube furnace set to 0
8/9/2012	10:51:56 AM	Helium valve closed
8/9/2012	10:51:56 AM	BCl3 valve closed
8/9/2012	10:51:56 AM	PH3 valve closed
8/9/2012	10:51:56 AM	SiCl4 pre valve closed
8/9/2012	10:51:56 AM	SiCl4 post valve closed
8/9/2012	10:51:56 AM	Main Vac valve closed
8/9/2012	10:51:56 AM	Bypass valve closed
8/9/2012	10:51:56 AM	H2 valve opened
8/9/2012	10:51:56 AM	Bubbler valve opened
8/9/2012	10:51:56 AM	Helium MFC set to  0.000000
8/9/2012	10:51:56 AM	H2 MFC set to  500.000000
8/9/2012	10:51:56 AM	BCl3 MFC set to  0.000000
8/9/2012	10:51:56 AM	PH3 MFC set to  0.000000
8/9/2012	10:51:56 AM	SiCl4 MFC set to  0.000000
8/9/2012	10:51:56 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:51:56 AM	Tube furnace set to 1000
8/9/2012	11:16:56 AM	Helium valve closed
8/9/2012	11:16:56 AM	PH3 valve closed
8/9/2012	11:16:56 AM	Main Vac valve closed
8/9/2012	11:16:56 AM	Bypass valve closed
8/9/2012	11:16:56 AM	H2 valve opened
8/9/2012	11:16:56 AM	BCl3 valve opened
8/9/2012	11:16:56 AM	SiCl4 pre valve opened
8/9/2012	11:16:56 AM	SiCl4 post valve opened
8/9/2012	11:16:56 AM	Bubbler valve opened
8/9/2012	11:16:56 AM	Helium MFC set to  0.000000
8/9/2012	11:16:56 AM	H2 MFC set to  430.000000
8/9/2012	11:16:56 AM	BCl3 MFC set to  20.000000
8/9/2012	11:16:56 AM	PH3 MFC set to  0.000000
8/9/2012	11:16:56 AM	SiCl4 MFC set to  50.000000
8/9/2012	11:16:56 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	11:16:56 AM	Tube furnace set to 1000
8/9/2012	11:21:56 AM	Helium valve closed
8/9/2012	11:21:56 AM	PH3 valve closed
8/9/2012	11:21:56 AM	Main Vac valve closed
8/9/2012	11:21:56 AM	Bypass valve closed
8/9/2012	11:21:56 AM	H2 valve opened
8/9/2012	11:21:56 AM	BCl3 valve opened
8/9/2012	11:21:56 AM	SiCl4 pre valve opened
8/9/2012	11:21:56 AM	SiCl4 post valve opened
8/9/2012	11:21:56 AM	Bubbler valve opened
8/9/2012	11:21:56 AM	Helium MFC set to  0.000000
8/9/2012	11:21:56 AM	H2 MFC set to  450.000000
8/9/2012	11:21:56 AM	BCl3 MFC set to  1.000000
8/9/2012	11:21:56 AM	PH3 MFC set to  0.000000
8/9/2012	11:21:56 AM	SiCl4 MFC set to  50.000000
8/9/2012	11:21:56 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	11:21:56 AM	Tube furnace set to 1000
8/9/2012	11:50:26 AM	Helium valve closed
8/9/2012	11:50:26 AM	BCl3 valve closed
8/9/2012	11:50:26 AM	Main Vac valve closed
8/9/2012	11:50:26 AM	Bypass valve closed
8/9/2012	11:50:26 AM	H2 valve opened
8/9/2012	11:50:26 AM	PH3 valve opened
8/9/2012	11:50:26 AM	SiCl4 pre valve opened
8/9/2012	11:50:26 AM	SiCl4 post valve opened
8/9/2012	11:50:26 AM	Bubbler valve opened
8/9/2012	11:50:26 AM	Helium MFC set to  0.000000
8/9/2012	11:50:26 AM	H2 MFC set to  430.000000
8/9/2012	11:50:26 AM	BCl3 MFC set to  0.000000
8/9/2012	11:50:26 AM	PH3 MFC set to  20.000000
8/9/2012	11:50:26 AM	SiCl4 MFC set to  50.000000
8/9/2012	11:50:26 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	11:50:27 AM	Tube furnace set to 1000
8/9/2012	11:51:27 AM	Helium valve closed
8/9/2012	11:51:27 AM	BCl3 valve closed
8/9/2012	11:51:27 AM	Main Vac valve closed
8/9/2012	11:51:27 AM	Bypass valve closed
8/9/2012	11:51:27 AM	H2 valve opened
8/9/2012	11:51:27 AM	PH3 valve opened
8/9/2012	11:51:27 AM	SiCl4 pre valve opened
8/9/2012	11:51:27 AM	SiCl4 post valve opened
8/9/2012	11:51:27 AM	Bubbler valve opened
8/9/2012	11:51:27 AM	Helium MFC set to  0.000000
8/9/2012	11:51:27 AM	H2 MFC set to  445.000000
8/9/2012	11:51:27 AM	BCl3 MFC set to  0.000000
8/9/2012	11:51:27 AM	PH3 MFC set to  5.000000
8/9/2012	11:51:27 AM	SiCl4 MFC set to  50.000000
8/9/2012	11:51:27 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	11:51:27 AM	Tube furnace set to 1000
8/9/2012	11:51:57 AM	Helium valve closed
8/9/2012	11:51:57 AM	BCl3 valve closed
8/9/2012	11:51:57 AM	PH3 valve closed
8/9/2012	11:51:57 AM	SiCl4 pre valve closed
8/9/2012	11:51:57 AM	SiCl4 post valve closed
8/9/2012	11:51:57 AM	Main Vac valve closed
8/9/2012	11:51:57 AM	Bypass valve closed
8/9/2012	11:51:57 AM	H2 valve opened
8/9/2012	11:51:57 AM	Bubbler valve opened
8/9/2012	11:51:57 AM	Helium MFC set to  0.000000
8/9/2012	11:51:57 AM	H2 MFC set to  500.000000
8/9/2012	11:51:57 AM	BCl3 MFC set to  0.000000
8/9/2012	11:51:57 AM	PH3 MFC set to  0.000000
8/9/2012	11:51:57 AM	SiCl4 MFC set to  0.000000
8/9/2012	11:51:57 AM	Bypass solenoid MFC set to  0.000000
8/9/2012	11:51:57 AM	Tube furnace set to 750
8/9/2012	12:06:57 PM	H2 valve closed
8/9/2012	12:06:57 PM	BCl3 valve closed
8/9/2012	12:06:57 PM	PH3 valve closed
8/9/2012	12:06:57 PM	SiCl4 pre valve closed
8/9/2012	12:06:57 PM	SiCl4 post valve closed
8/9/2012	12:06:57 PM	Main Vac valve closed
8/9/2012	12:06:57 PM	Bypass valve closed
8/9/2012	12:06:57 PM	Helium valve opened
8/9/2012	12:06:57 PM	Bubbler valve opened
8/9/2012	12:06:57 PM	Helium MFC set to  500.000000
8/9/2012	12:06:57 PM	H2 MFC set to  0.000000
8/9/2012	12:06:57 PM	BCl3 MFC set to  0.000000
8/9/2012	12:06:57 PM	PH3 MFC set to  0.000000
8/9/2012	12:06:57 PM	SiCl4 MFC set to  0.000000
8/9/2012	12:06:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	12:06:57 PM	Tube furnace set to 0
8/9/2012	12:26:57 PM	Helium valve closed
8/9/2012	12:26:57 PM	H2 valve closed
8/9/2012	12:26:57 PM	BCl3 valve closed
8/9/2012	12:26:57 PM	PH3 valve closed
8/9/2012	12:26:57 PM	SiCl4 pre valve closed
8/9/2012	12:26:57 PM	SiCl4 post valve closed
8/9/2012	12:26:57 PM	Main Vac valve closed
8/9/2012	12:26:57 PM	Bypass valve closed
8/9/2012	12:26:57 PM	Bubbler valve closed
8/9/2012	12:26:57 PM	Helium MFC set to  0.000000
8/9/2012	12:26:57 PM	H2 MFC set to  0.000000
8/9/2012	12:26:57 PM	BCl3 MFC set to  0.000000
8/9/2012	12:26:57 PM	PH3 MFC set to  0.000000
8/9/2012	12:26:57 PM	SiCl4 MFC set to  0.000000
8/9/2012	12:26:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	12:26:57 PM	Tube furnace set to 0
8/9/2012	12:46:57 PM	Helium valve closed
8/9/2012	12:46:57 PM	H2 valve closed
8/9/2012	12:46:57 PM	BCl3 valve closed
8/9/2012	12:46:57 PM	PH3 valve closed
8/9/2012	12:46:57 PM	SiCl4 pre valve closed
8/9/2012	12:46:57 PM	SiCl4 post valve closed
8/9/2012	12:46:57 PM	Main Vac valve closed
8/9/2012	12:46:57 PM	Bubbler valve closed
8/9/2012	12:46:57 PM	Bypass valve opened
8/9/2012	12:46:57 PM	Helium MFC set to  0.000000
8/9/2012	12:46:57 PM	H2 MFC set to  0.000000
8/9/2012	12:46:57 PM	BCl3 MFC set to  0.000000
8/9/2012	12:46:57 PM	PH3 MFC set to  0.000000
8/9/2012	12:46:57 PM	SiCl4 MFC set to  0.000000
8/9/2012	12:46:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	12:46:58 PM	Tube furnace set to 0
8/9/2012	12:47:57 PM	Helium valve closed
8/9/2012	12:47:57 PM	H2 valve closed
8/9/2012	12:47:57 PM	BCl3 valve closed
8/9/2012	12:47:57 PM	PH3 valve closed
8/9/2012	12:47:57 PM	SiCl4 pre valve closed
8/9/2012	12:47:57 PM	SiCl4 post valve closed
8/9/2012	12:47:57 PM	Main Vac valve closed
8/9/2012	12:47:57 PM	Bubbler valve closed
8/9/2012	12:47:57 PM	Bypass valve opened
8/9/2012	12:47:57 PM	Helium MFC set to  0.000000
8/9/2012	12:47:57 PM	H2 MFC set to  0.000000
8/9/2012	12:47:57 PM	BCl3 MFC set to  0.000000
8/9/2012	12:47:57 PM	PH3 MFC set to  0.000000
8/9/2012	12:47:57 PM	SiCl4 MFC set to  0.000000
8/9/2012	12:47:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	12:47:57 PM	Tube furnace set to 0
8/9/2012	12:48:57 PM	Helium valve closed
8/9/2012	12:48:57 PM	H2 valve closed
8/9/2012	12:48:57 PM	BCl3 valve closed
8/9/2012	12:48:57 PM	PH3 valve closed
8/9/2012	12:48:57 PM	SiCl4 pre valve closed
8/9/2012	12:48:57 PM	SiCl4 post valve closed
8/9/2012	12:48:57 PM	Bypass valve closed
8/9/2012	12:48:57 PM	Bubbler valve closed
8/9/2012	12:48:57 PM	Main Vac valve opened
8/9/2012	12:48:57 PM	Helium MFC set to  0.000000
8/9/2012	12:48:57 PM	H2 MFC set to  0.000000
8/9/2012	12:48:57 PM	BCl3 MFC set to  0.000000
8/9/2012	12:48:57 PM	PH3 MFC set to  0.000000
8/9/2012	12:48:57 PM	SiCl4 MFC set to  0.000000
8/9/2012	12:48:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	12:48:57 PM	Tube furnace set to 0
8/9/2012	12:59:23 PM	Run finished at 12:59 PM
8/9/2012	1:00:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2012	1:00:47 PM	Recipe started at 1:00 PM
8/9/2012	1:00:47 PM	Helium valve closed
8/9/2012	1:00:47 PM	H2 valve closed
8/9/2012	1:00:47 PM	BCl3 valve closed
8/9/2012	1:00:47 PM	PH3 valve closed
8/9/2012	1:00:47 PM	SiCl4 pre valve closed
8/9/2012	1:00:47 PM	SiCl4 post valve closed
8/9/2012	1:00:47 PM	Main Vac valve closed
8/9/2012	1:00:47 PM	Bypass valve closed
8/9/2012	1:00:47 PM	Bubbler valve closed
8/9/2012	1:00:47 PM	Helium MFC set to  0.000000
8/9/2012	1:00:47 PM	H2 MFC set to  0.000000
8/9/2012	1:00:47 PM	BCl3 MFC set to  0.000000
8/9/2012	1:00:47 PM	PH3 MFC set to  0.000000
8/9/2012	1:00:47 PM	SiCl4 MFC set to  0.000000
8/9/2012	1:00:47 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	1:00:48 PM	Tube furnace set to 0
8/9/2012	1:00:51 PM	H2 valve closed
8/9/2012	1:00:51 PM	BCl3 valve closed
8/9/2012	1:00:51 PM	PH3 valve closed
8/9/2012	1:00:51 PM	SiCl4 pre valve closed
8/9/2012	1:00:51 PM	SiCl4 post valve closed
8/9/2012	1:00:51 PM	Main Vac valve closed
8/9/2012	1:00:51 PM	Bypass valve closed
8/9/2012	1:00:51 PM	Bubbler valve closed
8/9/2012	1:00:51 PM	Helium valve opened
8/9/2012	1:00:51 PM	Helium MFC set to  500.000000
8/9/2012	1:00:51 PM	H2 MFC set to  0.000000
8/9/2012	1:00:51 PM	BCl3 MFC set to  0.000000
8/9/2012	1:00:51 PM	PH3 MFC set to  0.000000
8/9/2012	1:00:51 PM	SiCl4 MFC set to  0.000000
8/9/2012	1:00:51 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	1:00:51 PM	Tube furnace set to 0
8/9/2012	1:02:00 PM	Helium valve closed
8/9/2012	1:02:00 PM	H2 valve closed
8/9/2012	1:02:00 PM	BCl3 valve closed
8/9/2012	1:02:00 PM	PH3 valve closed
8/9/2012	1:02:00 PM	SiCl4 pre valve closed
8/9/2012	1:02:00 PM	SiCl4 post valve closed
8/9/2012	1:02:00 PM	Main Vac valve closed
8/9/2012	1:02:00 PM	Bypass valve closed
8/9/2012	1:02:00 PM	Bubbler valve closed
8/9/2012	1:02:00 PM	Helium MFC set to  0.000000
8/9/2012	1:02:00 PM	H2 MFC set to  0.000000
8/9/2012	1:02:00 PM	BCl3 MFC set to  0.000000
8/9/2012	1:02:00 PM	PH3 MFC set to  0.000000
8/9/2012	1:02:00 PM	SiCl4 MFC set to  0.000000
8/9/2012	1:02:00 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	1:02:00 PM	Tube furnace set to 0
8/9/2012	1:02:01 PM	Run finished at 1:02 PM
8/9/2012	1:02:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2012	1:10:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2012	1:10:14 PM	Recipe started at 1:10 PM
8/9/2012	1:10:14 PM	Helium valve closed
8/9/2012	1:10:14 PM	H2 valve closed
8/9/2012	1:10:14 PM	BCl3 valve closed
8/9/2012	1:10:14 PM	PH3 valve closed
8/9/2012	1:10:14 PM	SiCl4 pre valve closed
8/9/2012	1:10:14 PM	SiCl4 post valve closed
8/9/2012	1:10:14 PM	Main Vac valve closed
8/9/2012	1:10:14 PM	Bubbler valve closed
8/9/2012	1:10:14 PM	Bypass valve opened
8/9/2012	1:10:14 PM	Helium MFC set to  0.000000
8/9/2012	1:10:14 PM	H2 MFC set to  0.000000
8/9/2012	1:10:14 PM	BCl3 MFC set to  0.000000
8/9/2012	1:10:14 PM	PH3 MFC set to  0.000000
8/9/2012	1:10:14 PM	SiCl4 MFC set to  0.000000
8/9/2012	1:10:14 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	1:10:14 PM	Tube furnace set to 0
8/9/2012	1:11:44 PM	Helium valve closed
8/9/2012	1:11:44 PM	H2 valve closed
8/9/2012	1:11:44 PM	BCl3 valve closed
8/9/2012	1:11:44 PM	PH3 valve closed
8/9/2012	1:11:44 PM	SiCl4 pre valve closed
8/9/2012	1:11:44 PM	SiCl4 post valve closed
8/9/2012	1:11:44 PM	Main Vac valve closed
8/9/2012	1:11:44 PM	Bubbler valve closed
8/9/2012	1:11:44 PM	Bypass valve opened
8/9/2012	1:11:44 PM	Helium MFC set to  0.000000
8/9/2012	1:11:44 PM	H2 MFC set to  0.000000
8/9/2012	1:11:44 PM	BCl3 MFC set to  0.000000
8/9/2012	1:11:44 PM	PH3 MFC set to  0.000000
8/9/2012	1:11:44 PM	SiCl4 MFC set to  0.000000
8/9/2012	1:11:44 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	1:11:44 PM	Tube furnace set to 0
8/9/2012	1:12:44 PM	Helium valve closed
8/9/2012	1:12:44 PM	H2 valve closed
8/9/2012	1:12:44 PM	BCl3 valve closed
8/9/2012	1:12:44 PM	PH3 valve closed
8/9/2012	1:12:44 PM	SiCl4 pre valve closed
8/9/2012	1:12:44 PM	SiCl4 post valve closed
8/9/2012	1:12:44 PM	Bypass valve closed
8/9/2012	1:12:44 PM	Bubbler valve closed
8/9/2012	1:12:44 PM	Main Vac valve opened
8/9/2012	1:12:44 PM	Helium MFC set to  0.000000
8/9/2012	1:12:44 PM	H2 MFC set to  0.000000
8/9/2012	1:12:45 PM	BCl3 MFC set to  0.000000
8/9/2012	1:12:45 PM	PH3 MFC set to  0.000000
8/9/2012	1:12:45 PM	SiCl4 MFC set to  0.000000
8/9/2012	1:12:45 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	1:12:45 PM	Tube furnace set to 0
8/9/2012	1:12:46 PM	Run finished at 1:12 PM
8/9/2012	1:12:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2012	2:35:22 PM	Main Vac valve closed
8/9/2012	2:35:34 PM	Main Vac valve opened
8/9/2012	2:36:12 PM	Recipe started at 2:36 PM
8/9/2012	2:36:12 PM	Helium valve closed
8/9/2012	2:36:12 PM	H2 valve closed
8/9/2012	2:36:12 PM	BCl3 valve closed
8/9/2012	2:36:12 PM	PH3 valve closed
8/9/2012	2:36:12 PM	SiCl4 pre valve closed
8/9/2012	2:36:12 PM	SiCl4 post valve closed
8/9/2012	2:36:12 PM	Bypass valve closed
8/9/2012	2:36:12 PM	Bubbler valve closed
8/9/2012	2:36:12 PM	Main Vac valve opened
8/9/2012	2:36:12 PM	Helium MFC set to  0.000000
8/9/2012	2:36:12 PM	H2 MFC set to  0.000000
8/9/2012	2:36:12 PM	BCl3 MFC set to  0.000000
8/9/2012	2:36:12 PM	PH3 MFC set to  0.000000
8/9/2012	2:36:12 PM	SiCl4 MFC set to  0.000000
8/9/2012	2:36:12 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	2:36:12 PM	Tube furnace set to 0
8/9/2012	2:36:15 PM	Helium valve closed
8/9/2012	2:36:15 PM	H2 valve closed
8/9/2012	2:36:15 PM	BCl3 valve closed
8/9/2012	2:36:15 PM	PH3 valve closed
8/9/2012	2:36:15 PM	SiCl4 pre valve closed
8/9/2012	2:36:15 PM	SiCl4 post valve closed
8/9/2012	2:36:15 PM	Main Vac valve closed
8/9/2012	2:36:15 PM	Bypass valve closed
8/9/2012	2:36:15 PM	Bubbler valve closed
8/9/2012	2:36:15 PM	Helium MFC set to  0.000000
8/9/2012	2:36:15 PM	H2 MFC set to  0.000000
8/9/2012	2:36:15 PM	BCl3 MFC set to  0.000000
8/9/2012	2:36:15 PM	PH3 MFC set to  0.000000
8/9/2012	2:36:15 PM	SiCl4 MFC set to  0.000000
8/9/2012	2:36:15 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	2:36:16 PM	Tube furnace set to 0
8/9/2012	2:36:19 PM	Helium valve closed
8/9/2012	2:36:19 PM	BCl3 valve closed
8/9/2012	2:36:19 PM	PH3 valve closed
8/9/2012	2:36:19 PM	SiCl4 pre valve closed
8/9/2012	2:36:19 PM	SiCl4 post valve closed
8/9/2012	2:36:19 PM	Main Vac valve closed
8/9/2012	2:36:19 PM	Bypass valve closed
8/9/2012	2:36:19 PM	Bubbler valve closed
8/9/2012	2:36:19 PM	H2 valve opened
8/9/2012	2:36:19 PM	Helium MFC set to  0.000000
8/9/2012	2:36:19 PM	H2 MFC set to  500.000000
8/9/2012	2:36:19 PM	BCl3 MFC set to  0.000000
8/9/2012	2:36:19 PM	PH3 MFC set to  0.000000
8/9/2012	2:36:19 PM	SiCl4 MFC set to  0.000000
8/9/2012	2:36:19 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	2:36:19 PM	Tube furnace set to 0
8/9/2012	2:37:32 PM	Helium valve closed
8/9/2012	2:37:32 PM	BCl3 valve closed
8/9/2012	2:37:32 PM	PH3 valve closed
8/9/2012	2:37:32 PM	SiCl4 pre valve closed
8/9/2012	2:37:32 PM	SiCl4 post valve closed
8/9/2012	2:37:32 PM	Main Vac valve closed
8/9/2012	2:37:32 PM	Bypass valve closed
8/9/2012	2:37:32 PM	H2 valve opened
8/9/2012	2:37:32 PM	Bubbler valve opened
8/9/2012	2:37:32 PM	Helium MFC set to  0.000000
8/9/2012	2:37:32 PM	H2 MFC set to  500.000000
8/9/2012	2:37:32 PM	BCl3 MFC set to  0.000000
8/9/2012	2:37:32 PM	PH3 MFC set to  0.000000
8/9/2012	2:37:32 PM	SiCl4 MFC set to  0.000000
8/9/2012	2:37:32 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	2:37:33 PM	Tube furnace set to 0
8/9/2012	2:37:34 PM	Helium valve closed
8/9/2012	2:37:34 PM	BCl3 valve closed
8/9/2012	2:37:34 PM	PH3 valve closed
8/9/2012	2:37:34 PM	SiCl4 pre valve closed
8/9/2012	2:37:34 PM	SiCl4 post valve closed
8/9/2012	2:37:34 PM	Main Vac valve closed
8/9/2012	2:37:34 PM	Bypass valve closed
8/9/2012	2:37:34 PM	H2 valve opened
8/9/2012	2:37:34 PM	Bubbler valve opened
8/9/2012	2:37:34 PM	Helium MFC set to  0.000000
8/9/2012	2:37:34 PM	H2 MFC set to  500.000000
8/9/2012	2:37:34 PM	BCl3 MFC set to  0.000000
8/9/2012	2:37:34 PM	PH3 MFC set to  0.000000
8/9/2012	2:37:34 PM	SiCl4 MFC set to  0.000000
8/9/2012	2:37:34 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	2:37:34 PM	Tube furnace set to 1000
8/9/2012	3:02:34 PM	Helium valve closed
8/9/2012	3:02:34 PM	PH3 valve closed
8/9/2012	3:02:34 PM	Main Vac valve closed
8/9/2012	3:02:34 PM	Bypass valve closed
8/9/2012	3:02:34 PM	H2 valve opened
8/9/2012	3:02:34 PM	BCl3 valve opened
8/9/2012	3:02:34 PM	SiCl4 pre valve opened
8/9/2012	3:02:34 PM	SiCl4 post valve opened
8/9/2012	3:02:34 PM	Bubbler valve opened
8/9/2012	3:02:34 PM	Helium MFC set to  0.000000
8/9/2012	3:02:34 PM	H2 MFC set to  430.000000
8/9/2012	3:02:34 PM	BCl3 MFC set to  20.000000
8/9/2012	3:02:34 PM	PH3 MFC set to  0.000000
8/9/2012	3:02:34 PM	SiCl4 MFC set to  50.000000
8/9/2012	3:02:34 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	3:02:34 PM	Tube furnace set to 1000
8/9/2012	3:07:34 PM	Helium valve closed
8/9/2012	3:07:34 PM	PH3 valve closed
8/9/2012	3:07:34 PM	Main Vac valve closed
8/9/2012	3:07:34 PM	Bypass valve closed
8/9/2012	3:07:34 PM	H2 valve opened
8/9/2012	3:07:34 PM	BCl3 valve opened
8/9/2012	3:07:34 PM	SiCl4 pre valve opened
8/9/2012	3:07:34 PM	SiCl4 post valve opened
8/9/2012	3:07:34 PM	Bubbler valve opened
8/9/2012	3:07:34 PM	Helium MFC set to  0.000000
8/9/2012	3:07:34 PM	H2 MFC set to  450.000000
8/9/2012	3:07:34 PM	BCl3 MFC set to  1.000000
8/9/2012	3:07:34 PM	PH3 MFC set to  0.000000
8/9/2012	3:07:34 PM	SiCl4 MFC set to  50.000000
8/9/2012	3:07:34 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	3:07:34 PM	Tube furnace set to 1000
8/9/2012	3:36:04 PM	Helium valve closed
8/9/2012	3:36:04 PM	BCl3 valve closed
8/9/2012	3:36:04 PM	Main Vac valve closed
8/9/2012	3:36:04 PM	Bypass valve closed
8/9/2012	3:36:04 PM	H2 valve opened
8/9/2012	3:36:04 PM	PH3 valve opened
8/9/2012	3:36:04 PM	SiCl4 pre valve opened
8/9/2012	3:36:04 PM	SiCl4 post valve opened
8/9/2012	3:36:04 PM	Bubbler valve opened
8/9/2012	3:36:04 PM	Helium MFC set to  0.000000
8/9/2012	3:36:04 PM	H2 MFC set to  430.000000
8/9/2012	3:36:04 PM	BCl3 MFC set to  0.000000
8/9/2012	3:36:04 PM	PH3 MFC set to  20.000000
8/9/2012	3:36:04 PM	SiCl4 MFC set to  50.000000
8/9/2012	3:36:04 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	3:36:04 PM	Tube furnace set to 1000
8/9/2012	3:37:04 PM	Helium valve closed
8/9/2012	3:37:04 PM	BCl3 valve closed
8/9/2012	3:37:04 PM	Main Vac valve closed
8/9/2012	3:37:04 PM	Bypass valve closed
8/9/2012	3:37:04 PM	H2 valve opened
8/9/2012	3:37:04 PM	PH3 valve opened
8/9/2012	3:37:04 PM	SiCl4 pre valve opened
8/9/2012	3:37:04 PM	SiCl4 post valve opened
8/9/2012	3:37:04 PM	Bubbler valve opened
8/9/2012	3:37:04 PM	Helium MFC set to  0.000000
8/9/2012	3:37:04 PM	H2 MFC set to  445.000000
8/9/2012	3:37:04 PM	BCl3 MFC set to  0.000000
8/9/2012	3:37:04 PM	PH3 MFC set to  5.000000
8/9/2012	3:37:04 PM	SiCl4 MFC set to  50.000000
8/9/2012	3:37:04 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	3:37:05 PM	Tube furnace set to 1000
8/9/2012	3:37:35 PM	Helium valve closed
8/9/2012	3:37:35 PM	BCl3 valve closed
8/9/2012	3:37:35 PM	PH3 valve closed
8/9/2012	3:37:35 PM	SiCl4 pre valve closed
8/9/2012	3:37:35 PM	SiCl4 post valve closed
8/9/2012	3:37:35 PM	Main Vac valve closed
8/9/2012	3:37:35 PM	Bypass valve closed
8/9/2012	3:37:35 PM	H2 valve opened
8/9/2012	3:37:35 PM	Bubbler valve opened
8/9/2012	3:37:35 PM	Helium MFC set to  0.000000
8/9/2012	3:37:35 PM	H2 MFC set to  500.000000
8/9/2012	3:37:35 PM	BCl3 MFC set to  0.000000
8/9/2012	3:37:35 PM	PH3 MFC set to  0.000000
8/9/2012	3:37:35 PM	SiCl4 MFC set to  0.000000
8/9/2012	3:37:35 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	3:37:35 PM	Tube furnace set to 750
8/9/2012	3:52:35 PM	H2 valve closed
8/9/2012	3:52:35 PM	BCl3 valve closed
8/9/2012	3:52:35 PM	PH3 valve closed
8/9/2012	3:52:35 PM	SiCl4 pre valve closed
8/9/2012	3:52:35 PM	SiCl4 post valve closed
8/9/2012	3:52:35 PM	Main Vac valve closed
8/9/2012	3:52:35 PM	Bypass valve closed
8/9/2012	3:52:35 PM	Helium valve opened
8/9/2012	3:52:35 PM	Bubbler valve opened
8/9/2012	3:52:35 PM	Helium MFC set to  500.000000
8/9/2012	3:52:35 PM	H2 MFC set to  0.000000
8/9/2012	3:52:35 PM	BCl3 MFC set to  0.000000
8/9/2012	3:52:35 PM	PH3 MFC set to  0.000000
8/9/2012	3:52:35 PM	SiCl4 MFC set to  0.000000
8/9/2012	3:52:35 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	3:52:35 PM	Tube furnace set to 0
8/9/2012	4:12:35 PM	Helium valve closed
8/9/2012	4:12:35 PM	H2 valve closed
8/9/2012	4:12:35 PM	BCl3 valve closed
8/9/2012	4:12:35 PM	PH3 valve closed
8/9/2012	4:12:35 PM	SiCl4 pre valve closed
8/9/2012	4:12:35 PM	SiCl4 post valve closed
8/9/2012	4:12:35 PM	Main Vac valve closed
8/9/2012	4:12:35 PM	Bypass valve closed
8/9/2012	4:12:35 PM	Bubbler valve closed
8/9/2012	4:12:35 PM	Helium MFC set to  0.000000
8/9/2012	4:12:35 PM	H2 MFC set to  0.000000
8/9/2012	4:12:35 PM	BCl3 MFC set to  0.000000
8/9/2012	4:12:35 PM	PH3 MFC set to  0.000000
8/9/2012	4:12:35 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:12:35 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:12:35 PM	Tube furnace set to 0
8/9/2012	4:24:53 PM	Helium valve closed
8/9/2012	4:24:53 PM	H2 valve closed
8/9/2012	4:24:53 PM	BCl3 valve closed
8/9/2012	4:24:53 PM	PH3 valve closed
8/9/2012	4:24:53 PM	SiCl4 pre valve closed
8/9/2012	4:24:53 PM	SiCl4 post valve closed
8/9/2012	4:24:53 PM	Main Vac valve closed
8/9/2012	4:24:53 PM	Bubbler valve closed
8/9/2012	4:24:53 PM	Bypass valve opened
8/9/2012	4:24:53 PM	Helium MFC set to  0.000000
8/9/2012	4:24:53 PM	H2 MFC set to  0.000000
8/9/2012	4:24:53 PM	BCl3 MFC set to  0.000000
8/9/2012	4:24:53 PM	PH3 MFC set to  0.000000
8/9/2012	4:24:53 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:24:53 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:24:53 PM	Tube furnace set to 0
8/9/2012	4:25:54 PM	Helium valve closed
8/9/2012	4:25:54 PM	H2 valve closed
8/9/2012	4:25:54 PM	BCl3 valve closed
8/9/2012	4:25:54 PM	PH3 valve closed
8/9/2012	4:25:54 PM	SiCl4 pre valve closed
8/9/2012	4:25:54 PM	SiCl4 post valve closed
8/9/2012	4:25:54 PM	Main Vac valve closed
8/9/2012	4:25:54 PM	Bubbler valve closed
8/9/2012	4:25:54 PM	Bypass valve opened
8/9/2012	4:25:54 PM	Helium MFC set to  0.000000
8/9/2012	4:25:54 PM	H2 MFC set to  0.000000
8/9/2012	4:25:54 PM	BCl3 MFC set to  0.000000
8/9/2012	4:25:54 PM	PH3 MFC set to  0.000000
8/9/2012	4:25:54 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:25:54 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:25:54 PM	Tube furnace set to 0
8/9/2012	4:26:54 PM	Helium valve closed
8/9/2012	4:26:54 PM	H2 valve closed
8/9/2012	4:26:54 PM	BCl3 valve closed
8/9/2012	4:26:54 PM	PH3 valve closed
8/9/2012	4:26:54 PM	SiCl4 pre valve closed
8/9/2012	4:26:54 PM	SiCl4 post valve closed
8/9/2012	4:26:54 PM	Bypass valve closed
8/9/2012	4:26:54 PM	Bubbler valve closed
8/9/2012	4:26:54 PM	Main Vac valve opened
8/9/2012	4:26:54 PM	Helium MFC set to  0.000000
8/9/2012	4:26:54 PM	H2 MFC set to  0.000000
8/9/2012	4:26:54 PM	BCl3 MFC set to  0.000000
8/9/2012	4:26:54 PM	PH3 MFC set to  0.000000
8/9/2012	4:26:54 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:26:54 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:26:54 PM	Tube furnace set to 0
8/9/2012	4:35:15 PM	Run finished at 4:35 PM
8/9/2012	4:35:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2012	4:35:20 PM	Recipe started at 4:35 PM
8/9/2012	4:35:20 PM	Helium valve closed
8/9/2012	4:35:20 PM	H2 valve closed
8/9/2012	4:35:20 PM	BCl3 valve closed
8/9/2012	4:35:20 PM	PH3 valve closed
8/9/2012	4:35:20 PM	SiCl4 pre valve closed
8/9/2012	4:35:20 PM	SiCl4 post valve closed
8/9/2012	4:35:20 PM	Main Vac valve closed
8/9/2012	4:35:20 PM	Bypass valve closed
8/9/2012	4:35:20 PM	Bubbler valve closed
8/9/2012	4:35:20 PM	Helium MFC set to  0.000000
8/9/2012	4:35:20 PM	H2 MFC set to  0.000000
8/9/2012	4:35:20 PM	BCl3 MFC set to  0.000000
8/9/2012	4:35:20 PM	PH3 MFC set to  0.000000
8/9/2012	4:35:20 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:35:20 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:35:21 PM	Tube furnace set to 0
8/9/2012	4:35:24 PM	H2 valve closed
8/9/2012	4:35:24 PM	BCl3 valve closed
8/9/2012	4:35:24 PM	PH3 valve closed
8/9/2012	4:35:24 PM	SiCl4 pre valve closed
8/9/2012	4:35:24 PM	SiCl4 post valve closed
8/9/2012	4:35:24 PM	Main Vac valve closed
8/9/2012	4:35:24 PM	Bypass valve closed
8/9/2012	4:35:24 PM	Bubbler valve closed
8/9/2012	4:35:24 PM	Helium valve opened
8/9/2012	4:35:24 PM	Helium MFC set to  500.000000
8/9/2012	4:35:24 PM	H2 MFC set to  0.000000
8/9/2012	4:35:24 PM	BCl3 MFC set to  0.000000
8/9/2012	4:35:24 PM	PH3 MFC set to  0.000000
8/9/2012	4:35:24 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:35:24 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:35:24 PM	Tube furnace set to 0
8/9/2012	4:36:33 PM	Helium valve closed
8/9/2012	4:36:33 PM	H2 valve closed
8/9/2012	4:36:33 PM	BCl3 valve closed
8/9/2012	4:36:33 PM	PH3 valve closed
8/9/2012	4:36:33 PM	SiCl4 pre valve closed
8/9/2012	4:36:33 PM	SiCl4 post valve closed
8/9/2012	4:36:33 PM	Main Vac valve closed
8/9/2012	4:36:33 PM	Bypass valve closed
8/9/2012	4:36:33 PM	Bubbler valve closed
8/9/2012	4:36:33 PM	Helium MFC set to  0.000000
8/9/2012	4:36:33 PM	H2 MFC set to  0.000000
8/9/2012	4:36:33 PM	BCl3 MFC set to  0.000000
8/9/2012	4:36:33 PM	PH3 MFC set to  0.000000
8/9/2012	4:36:33 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:36:33 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:36:33 PM	Tube furnace set to 0
8/9/2012	4:36:34 PM	Run finished at 4:36 PM
8/9/2012	4:36:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2012	4:41:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2012	4:41:46 PM	Recipe started at 4:41 PM
8/9/2012	4:41:46 PM	Helium valve closed
8/9/2012	4:41:46 PM	H2 valve closed
8/9/2012	4:41:46 PM	BCl3 valve closed
8/9/2012	4:41:46 PM	PH3 valve closed
8/9/2012	4:41:46 PM	SiCl4 pre valve closed
8/9/2012	4:41:46 PM	SiCl4 post valve closed
8/9/2012	4:41:46 PM	Main Vac valve closed
8/9/2012	4:41:46 PM	Bubbler valve closed
8/9/2012	4:41:46 PM	Bypass valve opened
8/9/2012	4:41:46 PM	Helium MFC set to  0.000000
8/9/2012	4:41:46 PM	H2 MFC set to  0.000000
8/9/2012	4:41:47 PM	BCl3 MFC set to  0.000000
8/9/2012	4:41:47 PM	PH3 MFC set to  0.000000
8/9/2012	4:41:47 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:41:47 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:41:47 PM	Tube furnace set to 0
8/9/2012	4:43:07 PM	Helium valve closed
8/9/2012	4:43:07 PM	H2 valve closed
8/9/2012	4:43:07 PM	BCl3 valve closed
8/9/2012	4:43:07 PM	PH3 valve closed
8/9/2012	4:43:07 PM	SiCl4 pre valve closed
8/9/2012	4:43:07 PM	SiCl4 post valve closed
8/9/2012	4:43:07 PM	Main Vac valve closed
8/9/2012	4:43:07 PM	Bubbler valve closed
8/9/2012	4:43:07 PM	Bypass valve opened
8/9/2012	4:43:07 PM	Helium MFC set to  0.000000
8/9/2012	4:43:07 PM	H2 MFC set to  0.000000
8/9/2012	4:43:07 PM	BCl3 MFC set to  0.000000
8/9/2012	4:43:07 PM	PH3 MFC set to  0.000000
8/9/2012	4:43:07 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:43:07 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:43:07 PM	Tube furnace set to 0
8/9/2012	4:44:07 PM	Helium valve closed
8/9/2012	4:44:07 PM	H2 valve closed
8/9/2012	4:44:07 PM	BCl3 valve closed
8/9/2012	4:44:07 PM	PH3 valve closed
8/9/2012	4:44:07 PM	SiCl4 pre valve closed
8/9/2012	4:44:07 PM	SiCl4 post valve closed
8/9/2012	4:44:07 PM	Bypass valve closed
8/9/2012	4:44:07 PM	Bubbler valve closed
8/9/2012	4:44:07 PM	Main Vac valve opened
8/9/2012	4:44:07 PM	Helium MFC set to  0.000000
8/9/2012	4:44:08 PM	H2 MFC set to  0.000000
8/9/2012	4:44:08 PM	BCl3 MFC set to  0.000000
8/9/2012	4:44:08 PM	PH3 MFC set to  0.000000
8/9/2012	4:44:08 PM	SiCl4 MFC set to  0.000000
8/9/2012	4:44:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	4:44:08 PM	Tube furnace set to 0
8/9/2012	4:44:09 PM	Run finished at 4:44 PM
8/9/2012	4:44:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2012	5:04:48 PM	Recipe started at 5:04 PM
8/9/2012	5:04:48 PM	Helium valve closed
8/9/2012	5:04:48 PM	H2 valve closed
8/9/2012	5:04:48 PM	BCl3 valve closed
8/9/2012	5:04:48 PM	PH3 valve closed
8/9/2012	5:04:48 PM	SiCl4 pre valve closed
8/9/2012	5:04:48 PM	SiCl4 post valve closed
8/9/2012	5:04:48 PM	Bypass valve closed
8/9/2012	5:04:48 PM	Bubbler valve closed
8/9/2012	5:04:48 PM	Main Vac valve opened
8/9/2012	5:04:48 PM	Helium MFC set to  0.000000
8/9/2012	5:04:48 PM	H2 MFC set to  0.000000
8/9/2012	5:04:48 PM	BCl3 MFC set to  0.000000
8/9/2012	5:04:48 PM	PH3 MFC set to  0.000000
8/9/2012	5:04:48 PM	SiCl4 MFC set to  0.000000
8/9/2012	5:04:48 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	5:04:48 PM	Tube furnace set to 0
8/9/2012	8:04:48 PM	Helium valve closed
8/9/2012	8:04:48 PM	H2 valve closed
8/9/2012	8:04:48 PM	BCl3 valve closed
8/9/2012	8:04:48 PM	PH3 valve closed
8/9/2012	8:04:48 PM	SiCl4 pre valve closed
8/9/2012	8:04:48 PM	SiCl4 post valve closed
8/9/2012	8:04:48 PM	Main Vac valve closed
8/9/2012	8:04:48 PM	Bypass valve closed
8/9/2012	8:04:48 PM	Bubbler valve closed
8/9/2012	8:04:48 PM	Helium MFC set to  0.000000
8/9/2012	8:04:48 PM	H2 MFC set to  0.000000
8/9/2012	8:04:48 PM	BCl3 MFC set to  0.000000
8/9/2012	8:04:48 PM	PH3 MFC set to  0.000000
8/9/2012	8:04:48 PM	SiCl4 MFC set to  0.000000
8/9/2012	8:04:48 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	8:04:48 PM	Tube furnace set to 0
8/9/2012	8:04:51 PM	Helium valve closed
8/9/2012	8:04:51 PM	BCl3 valve closed
8/9/2012	8:04:51 PM	PH3 valve closed
8/9/2012	8:04:51 PM	SiCl4 pre valve closed
8/9/2012	8:04:51 PM	SiCl4 post valve closed
8/9/2012	8:04:51 PM	Main Vac valve closed
8/9/2012	8:04:51 PM	Bypass valve closed
8/9/2012	8:04:51 PM	Bubbler valve closed
8/9/2012	8:04:51 PM	H2 valve opened
8/9/2012	8:04:51 PM	Helium MFC set to  0.000000
8/9/2012	8:04:51 PM	H2 MFC set to  500.000000
8/9/2012	8:04:51 PM	BCl3 MFC set to  0.000000
8/9/2012	8:04:51 PM	PH3 MFC set to  0.000000
8/9/2012	8:04:51 PM	SiCl4 MFC set to  0.000000
8/9/2012	8:04:51 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	8:04:51 PM	Tube furnace set to 0
8/9/2012	8:06:06 PM	Helium valve closed
8/9/2012	8:06:06 PM	BCl3 valve closed
8/9/2012	8:06:06 PM	PH3 valve closed
8/9/2012	8:06:06 PM	SiCl4 pre valve closed
8/9/2012	8:06:06 PM	SiCl4 post valve closed
8/9/2012	8:06:06 PM	Main Vac valve closed
8/9/2012	8:06:06 PM	Bypass valve closed
8/9/2012	8:06:06 PM	H2 valve opened
8/9/2012	8:06:06 PM	Bubbler valve opened
8/9/2012	8:06:06 PM	Helium MFC set to  0.000000
8/9/2012	8:06:06 PM	H2 MFC set to  500.000000
8/9/2012	8:06:06 PM	BCl3 MFC set to  0.000000
8/9/2012	8:06:06 PM	PH3 MFC set to  0.000000
8/9/2012	8:06:06 PM	SiCl4 MFC set to  0.000000
8/9/2012	8:06:06 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	8:06:07 PM	Tube furnace set to 0
8/9/2012	8:06:08 PM	Helium valve closed
8/9/2012	8:06:08 PM	BCl3 valve closed
8/9/2012	8:06:08 PM	PH3 valve closed
8/9/2012	8:06:08 PM	SiCl4 pre valve closed
8/9/2012	8:06:08 PM	SiCl4 post valve closed
8/9/2012	8:06:08 PM	Main Vac valve closed
8/9/2012	8:06:08 PM	Bypass valve closed
8/9/2012	8:06:08 PM	H2 valve opened
8/9/2012	8:06:08 PM	Bubbler valve opened
8/9/2012	8:06:08 PM	Helium MFC set to  0.000000
8/9/2012	8:06:08 PM	H2 MFC set to  500.000000
8/9/2012	8:06:08 PM	BCl3 MFC set to  0.000000
8/9/2012	8:06:08 PM	PH3 MFC set to  0.000000
8/9/2012	8:06:08 PM	SiCl4 MFC set to  0.000000
8/9/2012	8:06:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	8:06:08 PM	Tube furnace set to 1000
8/9/2012	8:31:08 PM	Helium valve closed
8/9/2012	8:31:08 PM	PH3 valve closed
8/9/2012	8:31:08 PM	Main Vac valve closed
8/9/2012	8:31:08 PM	Bypass valve closed
8/9/2012	8:31:08 PM	H2 valve opened
8/9/2012	8:31:08 PM	BCl3 valve opened
8/9/2012	8:31:08 PM	SiCl4 pre valve opened
8/9/2012	8:31:08 PM	SiCl4 post valve opened
8/9/2012	8:31:08 PM	Bubbler valve opened
8/9/2012	8:31:08 PM	Helium MFC set to  0.000000
8/9/2012	8:31:08 PM	H2 MFC set to  430.000000
8/9/2012	8:31:08 PM	BCl3 MFC set to  20.000000
8/9/2012	8:31:08 PM	PH3 MFC set to  0.000000
8/9/2012	8:31:08 PM	SiCl4 MFC set to  50.000000
8/9/2012	8:31:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	8:31:08 PM	Tube furnace set to 1000
8/9/2012	8:36:08 PM	Helium valve closed
8/9/2012	8:36:08 PM	PH3 valve closed
8/9/2012	8:36:08 PM	Main Vac valve closed
8/9/2012	8:36:08 PM	Bypass valve closed
8/9/2012	8:36:08 PM	H2 valve opened
8/9/2012	8:36:08 PM	BCl3 valve opened
8/9/2012	8:36:08 PM	SiCl4 pre valve opened
8/9/2012	8:36:08 PM	SiCl4 post valve opened
8/9/2012	8:36:08 PM	Bubbler valve opened
8/9/2012	8:36:08 PM	Helium MFC set to  0.000000
8/9/2012	8:36:08 PM	H2 MFC set to  450.000000
8/9/2012	8:36:08 PM	BCl3 MFC set to  1.000000
8/9/2012	8:36:08 PM	PH3 MFC set to  0.000000
8/9/2012	8:36:08 PM	SiCl4 MFC set to  50.000000
8/9/2012	8:36:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	8:36:08 PM	Tube furnace set to 1000
8/9/2012	9:04:38 PM	Helium valve closed
8/9/2012	9:04:38 PM	BCl3 valve closed
8/9/2012	9:04:38 PM	Main Vac valve closed
8/9/2012	9:04:38 PM	Bypass valve closed
8/9/2012	9:04:38 PM	H2 valve opened
8/9/2012	9:04:38 PM	PH3 valve opened
8/9/2012	9:04:38 PM	SiCl4 pre valve opened
8/9/2012	9:04:38 PM	SiCl4 post valve opened
8/9/2012	9:04:38 PM	Bubbler valve opened
8/9/2012	9:04:38 PM	Helium MFC set to  0.000000
8/9/2012	9:04:38 PM	H2 MFC set to  430.000000
8/9/2012	9:04:38 PM	BCl3 MFC set to  0.000000
8/9/2012	9:04:38 PM	PH3 MFC set to  20.000000
8/9/2012	9:04:38 PM	SiCl4 MFC set to  50.000000
8/9/2012	9:04:38 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:04:38 PM	Tube furnace set to 1000
8/9/2012	9:05:38 PM	Helium valve closed
8/9/2012	9:05:38 PM	BCl3 valve closed
8/9/2012	9:05:38 PM	Main Vac valve closed
8/9/2012	9:05:38 PM	Bypass valve closed
8/9/2012	9:05:38 PM	H2 valve opened
8/9/2012	9:05:38 PM	PH3 valve opened
8/9/2012	9:05:38 PM	SiCl4 pre valve opened
8/9/2012	9:05:39 PM	SiCl4 post valve opened
8/9/2012	9:05:39 PM	Bubbler valve opened
8/9/2012	9:05:39 PM	Helium MFC set to  0.000000
8/9/2012	9:05:39 PM	H2 MFC set to  445.000000
8/9/2012	9:05:39 PM	BCl3 MFC set to  0.000000
8/9/2012	9:05:39 PM	PH3 MFC set to  5.000000
8/9/2012	9:05:39 PM	SiCl4 MFC set to  50.000000
8/9/2012	9:05:39 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:05:39 PM	Tube furnace set to 1000
8/9/2012	9:06:09 PM	Helium valve closed
8/9/2012	9:06:09 PM	BCl3 valve closed
8/9/2012	9:06:09 PM	PH3 valve closed
8/9/2012	9:06:09 PM	SiCl4 pre valve closed
8/9/2012	9:06:09 PM	SiCl4 post valve closed
8/9/2012	9:06:09 PM	Main Vac valve closed
8/9/2012	9:06:09 PM	Bypass valve closed
8/9/2012	9:06:09 PM	H2 valve opened
8/9/2012	9:06:09 PM	Bubbler valve opened
8/9/2012	9:06:09 PM	Helium MFC set to  0.000000
8/9/2012	9:06:09 PM	H2 MFC set to  500.000000
8/9/2012	9:06:09 PM	BCl3 MFC set to  0.000000
8/9/2012	9:06:09 PM	PH3 MFC set to  0.000000
8/9/2012	9:06:09 PM	SiCl4 MFC set to  0.000000
8/9/2012	9:06:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:06:09 PM	Tube furnace set to 750
8/9/2012	9:21:09 PM	H2 valve closed
8/9/2012	9:21:09 PM	BCl3 valve closed
8/9/2012	9:21:09 PM	PH3 valve closed
8/9/2012	9:21:09 PM	SiCl4 pre valve closed
8/9/2012	9:21:09 PM	SiCl4 post valve closed
8/9/2012	9:21:09 PM	Main Vac valve closed
8/9/2012	9:21:09 PM	Bypass valve closed
8/9/2012	9:21:09 PM	Helium valve opened
8/9/2012	9:21:09 PM	Bubbler valve opened
8/9/2012	9:21:09 PM	Helium MFC set to  500.000000
8/9/2012	9:21:09 PM	H2 MFC set to  0.000000
8/9/2012	9:21:09 PM	BCl3 MFC set to  0.000000
8/9/2012	9:21:09 PM	PH3 MFC set to  0.000000
8/9/2012	9:21:09 PM	SiCl4 MFC set to  0.000000
8/9/2012	9:21:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:21:09 PM	Tube furnace set to 0
8/9/2012	9:41:09 PM	Helium valve closed
8/9/2012	9:41:09 PM	H2 valve closed
8/9/2012	9:41:09 PM	BCl3 valve closed
8/9/2012	9:41:09 PM	PH3 valve closed
8/9/2012	9:41:09 PM	SiCl4 pre valve closed
8/9/2012	9:41:09 PM	SiCl4 post valve closed
8/9/2012	9:41:09 PM	Main Vac valve closed
8/9/2012	9:41:09 PM	Bypass valve closed
8/9/2012	9:41:09 PM	Bubbler valve closed
8/9/2012	9:41:09 PM	Helium MFC set to  0.000000
8/9/2012	9:41:09 PM	H2 MFC set to  0.000000
8/9/2012	9:41:09 PM	BCl3 MFC set to  0.000000
8/9/2012	9:41:09 PM	PH3 MFC set to  0.000000
8/9/2012	9:41:09 PM	SiCl4 MFC set to  0.000000
8/9/2012	9:41:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	9:41:09 PM	Tube furnace set to 0
8/9/2012	10:01:09 PM	Helium valve closed
8/9/2012	10:01:09 PM	H2 valve closed
8/9/2012	10:01:09 PM	BCl3 valve closed
8/9/2012	10:01:09 PM	PH3 valve closed
8/9/2012	10:01:09 PM	SiCl4 pre valve closed
8/9/2012	10:01:09 PM	SiCl4 post valve closed
8/9/2012	10:01:09 PM	Main Vac valve closed
8/9/2012	10:01:09 PM	Bubbler valve closed
8/9/2012	10:01:09 PM	Bypass valve opened
8/9/2012	10:01:09 PM	Helium MFC set to  0.000000
8/9/2012	10:01:09 PM	H2 MFC set to  0.000000
8/9/2012	10:01:09 PM	BCl3 MFC set to  0.000000
8/9/2012	10:01:09 PM	PH3 MFC set to  0.000000
8/9/2012	10:01:09 PM	SiCl4 MFC set to  0.000000
8/9/2012	10:01:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:01:09 PM	Tube furnace set to 0
8/9/2012	10:02:08 PM	Helium valve closed
8/9/2012	10:02:08 PM	H2 valve closed
8/9/2012	10:02:08 PM	BCl3 valve closed
8/9/2012	10:02:08 PM	PH3 valve closed
8/9/2012	10:02:08 PM	SiCl4 pre valve closed
8/9/2012	10:02:08 PM	SiCl4 post valve closed
8/9/2012	10:02:08 PM	Main Vac valve closed
8/9/2012	10:02:08 PM	Bubbler valve closed
8/9/2012	10:02:08 PM	Bypass valve opened
8/9/2012	10:02:08 PM	Helium MFC set to  0.000000
8/9/2012	10:02:08 PM	H2 MFC set to  0.000000
8/9/2012	10:02:08 PM	BCl3 MFC set to  0.000000
8/9/2012	10:02:08 PM	PH3 MFC set to  0.000000
8/9/2012	10:02:08 PM	SiCl4 MFC set to  0.000000
8/9/2012	10:02:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:02:08 PM	Tube furnace set to 0
8/9/2012	10:03:08 PM	Helium valve closed
8/9/2012	10:03:08 PM	H2 valve closed
8/9/2012	10:03:08 PM	BCl3 valve closed
8/9/2012	10:03:08 PM	PH3 valve closed
8/9/2012	10:03:08 PM	SiCl4 pre valve closed
8/9/2012	10:03:08 PM	SiCl4 post valve closed
8/9/2012	10:03:08 PM	Bypass valve closed
8/9/2012	10:03:09 PM	Bubbler valve closed
8/9/2012	10:03:09 PM	Main Vac valve opened
8/9/2012	10:03:09 PM	Helium MFC set to  0.000000
8/9/2012	10:03:09 PM	H2 MFC set to  0.000000
8/9/2012	10:03:09 PM	BCl3 MFC set to  0.000000
8/9/2012	10:03:09 PM	PH3 MFC set to  0.000000
8/9/2012	10:03:09 PM	SiCl4 MFC set to  0.000000
8/9/2012	10:03:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2012	10:03:09 PM	Tube furnace set to 0
8/9/2012	11:03:09 PM	Run finished at 11:03 PM
